Fabrication of solid state electronic devices usin

专利名称：Fabrication of solid state electronic devices

using fluorescent imaging of surfacetemperature profiles

发明人：Paul R. Kolodner申请号：US06/434635申请日：19821015公开号：US04455741A公开日：19840626

摘要：Solid state electronic devices are optically monitored during fabrication todetect hot spots which are indicative of faulty operation. The surface temperatures ofsuch a device are measured by applying a fluorescent material to the device, and

subsequently monitoring the temperature dependent fluorescence of the material, whichis reflective of the temperature of the underlying device. Devices are accepted, rejected,or further processed in response to the monitored fluorescence.

申请人：AT&T BELL LABORATORIES

代理人：Bernard Tiegerman,Bruce S. Schneider

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