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专利名称：Illumination optical system, exposure
apparatus, and device manufacturingmethod using the same
发明人：Kanjo Orino申请号：US11105866申请日：20050413公开号：US07170686B2公开日：20070130
专利附图：
摘要：Disclosed is an illumination optical system having an imaging optical system forimaging a predetermined object plane upon an image plane, by use of light supplied
from an integrator that functions to produce a plurality of light sources using light froma light source. In one preferred form of the invention, the imaging optical systemincludes, in an order from a light incidence side thereof, a first lens group having apositive power, a second lens group having a negative power, and a third lens grouphaving a positive power, wherein the second lens group includes a concave lens at a lightexit side thereof and wherein the third lens group includes a convex lens at a lightentrance side thereof. The position of intersection between an optical axis of the imagingoptical system and a principal ray of abaxial light is defined between the second lensgroup and the third lens group.
申请人：Kanjo Orino
地址：Tokyo JP
国籍：JP
代理机构：Morgan & Finnegan LLP
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