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专利名称:Optical film thickness measuring device发明人:Hoffmann, Erich,Krobok, Martin-Paul申请号:EP99202293.9申请日:19990713公开号:EP1069401A1公开日:20010117
摘要:Optical thickness measuring device comprising several light sources (2a-2n),being each one's light individually transmitted to the sample (31) by means of separatedillumination optic fibers (26a-26n). Light reflected at the sample is picked up by a secondset of optic fibers (27a-27n) in an Y arrangement with illumination fibers, and addressed(24) to spectrometer unit (23). Light sources or transmitting fibers are sequentiallyswitched so that signal from a single sample point reaches the detector at a time. Sampleis rotated by a support (29), and measuring points are distributed at different radii (Ra-Rn). Use of device for control of coating of digital video discs (DVD).
申请人:ODME International B.V.
地址:De Run 4315 5503 LP Veldhoven NL
国籍:NL
代理机构:Veldman-Dijkers, Cornelia G.C., Ir.
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