专利内容由知识产权出版社提供
专利名称：Film thickness detecting device发明人：戚 ▲務▼昌申请号：JP2018561614申请日：20160923公开号：JP6667675B2公开日：20200318
摘要：Film thickness detection apparatusCommon means (1) having at least onecommon electrode (11) andDetection means (2) andEquipped withDetection
meansHaving at least one sensor chip (21) and signal processing means (23);Each sensorchipThe common means (1) is provided with only one spacing opposed to the firstdirection.The conveying path of the film to be tested is constituted by the distancebetween the common means (1) and each sensor chip (21);Each sensor chipAt least onelineIncludes a plurality of sensing electrodes (211) arranged along a second direction;Thesecond direction is perpendicular to the moving direction of the film to be tested;Thefirst direction is perpendicular to the first plane;The first plane is parallel to the seconddirection;Each sensor chipThe electrical signals in the common electrode (11) are derivedand output.The signal processing meansElectrically connected to each sensor chipTheelectrical signals output from the respective sensor chips (21) are processed andoutputted.
申请人：威▲海▼▲華▼菱光▲電▼股▲フン▼有限公司
地址：中華人民共和国２６４２０９山▲東▼省威▲海▼市火炬高技▲術▼▲産▼▲業▼▲開▼▲発▼区科技路１７９号
国籍：CN
代理人：村山 靖彦,実広 信哉,阿部 達彦
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